|
Nanostructured silver films were produced by the gas-jet deposition method for the
temperatures of the Ag vapor source (a crucible) in the range 1200-1400K. The direct simulation
Monte Carlo method was applied for modeling the silver.helium mixture flow inside the crucible
with subsequent jet expansion into vacuum and detailed information on jet gasdynamics was
obtained. The helium carrier gas is shown to play an important role in the deposition process by
increasing both the metal atom velocity and flux onto the substrate. An optimal helium flux
resulting in the maximal silver deposition rate is found. The onset of cluster formation in the
Ag-He jet is determined. It is shown that for the experimental conditions silver clusters are not
generated in the jet and thus the observed nanostructures are formed on the substrate surface due
to diffusion and nucleation of the deposited atoms.
Keywords: silver films; gas-jet deposition method; direct simulation Monte Carlo; silver-helium vacuum expansion; cluster formation process. |
full paper (pdf, 1952 Kb)