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In this paper we investigate the emission properties of an array of silicon nanocones
containing cobalt nanoparticles at their vertices. Nanocones are formed on a silicon substrate by
deposition a cobalt film, processing it to obtain an array of nanoparticles with a diameter
of 20-30 nm and subsequent etching of silicon. Nanocones of silicon are separated from the
conductive substrate by a layer of silicon oxynitride with the thickness of 8 nm. The results of
modeling the current transfer in Si(Sb)/SiOxNy/Co nanocones and an estimation of their emission
properties are presented.
Keywords: electron transport, emission, nanocone, oxynitride, silicon |
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