A mathematical model of material deposition on a curvilinear surface is constructed.
The model considers convective heat transfer, heat transfer by radiation, heat and mass transfer
during the material attachment to the surface. The possibility of model modification is shown by
considering diffusive transfer of a material and the linear change of curvature through the plate
thickness. The numerical algorithm developed allows finding the temperature profile in a
curvilinear plate.
Keywords: chemical vapor deposition, curvilinear surface, numerical modeling |
full paper (pdf, 768 Kb)