No 1, Vol. 4, 2001 
 

ANALYSIS OF SURFACE EFFECTS ON MECHANICAL PROPERTIES OF MICROCANTILEVERS

P. Lu*, F. Shen*, S.J. O'Shea**, K. H. Lee*, T. Y. Ng*

*Institute of High Performance Computing, 89C Science Park Drive,
#02-11/12 The Rutherford, Singapore 118261
**Institute of Materials Research & Engineering, 3 Research Link, Singapore 117602

Abstract

In this paper, some problems concerning surface effects of microcantilever-based sensors are discussed. The problems include the influence on surface Q changes due to the variation of position and length of a coated film, and frequency changes induced by tensile or compressive surface stresses. Some useful results are obtained based on theoretical analysis, which are of interest in the design and fabrication of microcantilever based sensors.

full paper (pdf, 53 Kb)