| Yttrium stabilized zirconia coatings were deposited on titanium (hardened by high pressure torsion) by magnetron sputtering. The produced coating was compared with that deposited on polished Mo wafer. The results of XRD, X-ray fluorescence probe, and electron microscopy analysis provides an opportunity to study the phase composition and the structure of both coatings. The effect of wafer pretreatment on coating quality and microstructure is discussed, and the procedure of HPT titanium pre-treatment for magnetron sputtering is suggested. |
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