| The micromanufacturing based on nanopowder metallurgy and LIGA process was investigated. The micro-bearing metallic mold with high aspect ratio, for powder injection molding process, was fabricated by deep X-ray lithography and nickel electroplating process (LIGA process). The feedstock was prepared by mixing the metal alloy nanopowder and the wax-based binders. The process conditions were carefully controlled and optimized to produce the sound bearings. The maximum density of the sintered gas bearing with 80% powder fraction in volume was 94% of theoretical density. The dimensional tolerance of micro-structures in the sintered bearing was within 1% error limit. |
full paper (pdf, 1248 Kb)