Rev.Adv.Mater.Sci.(RAMS)
No 3, Vol. 10, 2005, pages 224-228

NANOCRYSTALLINE HF-CVD-GROWN DIAMOND AND ITS INDUSTRIAL APPLICATIONS

Kai Brühne, Hans J. Fecht, Peter Gluche and Andrè Flöter

Abstract

Nanocrystalline diamond layers with a thickness up to ∼ 90 µm have been prepared using the hot-filament chemical vapor deposition technique. These layers show no significant impurities of oxygen and tungsten and exhibit low tensile stress levels < 90 MPa. We obtained a preferential growth in the <110> direction. The estimation of the grain size using the Scherrer formula showed a value of 10 to 15 nm. Finally, potential industrial applications of nanocrystalline layers like diamond coatings of cutting tools and diamond tooth wheels are presented.

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