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1 Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho,
Totsuka-ku, Yokohama, Kanagawa 244-0817, Japan
2 National Institute of Advanced Industrial Science and Technology (AIST),
Tsukuba Central 5, 1-1 Higashi 1-chome Tsukuba, Ibaraki 305-8565, Japan
| Borazine-siloxane is an organic/inorganic hybrid polymer that can be synthesized by the hydrosilylation polymerization of a borazine compound containing acetylene groups and siloxane containing hydrosilyl groups. Spin coating a linear-polymer solution produces a thin film that is transformed into a network polymer by annealing. The borazine-siloxane thus obtained has excellent characteristics, such as a low dielectric constant, a high elastic modulus, and good heat resistance. The use of this polymer as an interconnect material should not only improve the performance of ULSIs by reducing the effective dielectric constant of multilayer wiring, but also enable the use of an environmentally friendly dry etching process without PFCs. |
full paper (pdf, 256 Kb)