Research directions:

Development of mathematical models and study of the nonlinear dynamics of nano- and microelectromechanical sensors based on the phenomenon of modal localization of oscillations in weakly coupled systems under electrostatic and laser thermo-optical excitation, taking into account the coupling of thermal, electrical and mechanical processes.

Main results:

• The dynamics and stability of elastic elements of nano- and microelectromechanical systems (N/MEMS) under laser thermo-optical effects have been studied. Mathematical modeling and development of algorithms for laser generation and control of oscillations of moving N/MEMS elements have been carried out.

• The architecture has been developed and mathematical modeling of the nonlinear dynamics of N/MEMS sensors based on the principle of modal localization of oscillations in systems of weakly coupled continuous elastic elements has been carried out.

• Models of highly sensitive N/MEMS sensors of physical quantities (accelerometers, gyroscopes, particle mass detectors, flow velocity sensors, etc.) based on nonlinear static and spectral characteristics of distributed elastic moving elements with projected initial geometric perturbations (multi-stable systems - systems with switches) have been developed.

Synchronization of oscillations of weakly coupled elastic elements of a differential resonant MEMS accelerometer in the dual-circuit autogenerator mode.