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Institute for Problems in Mechanical Engineering
of the Russian Academy of Sciences

Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences

MEMS gas sensor of resistive type for detection of hydrogen sulfide down to low concentrations

Autors:
I.M. Komarevtsev, A.S. Kondrateva, A.N. Kazakin, Ya.B. Enns, I.A. Lazdin, P.A. Karaseov, U.D. Akulshin ,
Pages:
009–022
Annotation:

The technological route to manufacture a resistive-type MEMS gas sensor for low analyte concentration detection is proposed and the main characteristics of the device are demonstrated. MEMS consists of a silicon substrate with nickel interdigital electrodes acting as a microheater, on top of which a thin (100 nm) gas-sensitive layer of nickel oxide (NiO) is deposited. The silicon substrate is etched from the back side of the device to achieve a membrane of about 50 microns. The operating temperature of the sensitive layer in measurement mode is 130–205 °C. The proposed device shows the effect of introducing hydrogen sulfide in a gas mixture from 1 to 100 ppm on the conductivity of the sensing layer.

File (pdf):
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