Effects of post-annealing duration on the properties of β-Ga2O3 thin films prepared by spray pyrolysis
The post-annealing duration dependence of structural and optical properties of polycrystalline β-Ga2O3 thin films fabricated on sapphire (Al2O3) substrate via the spray pyrolysis method are presented. Extending the annealing time for fixed temperature 900 °C from 1 to 2 h improves crystallinity of the films, as evidenced by an increase in the average grain size approximately from 8 to 14 nm, a reduction in the full width at half maximum of the