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Institute for Problems in Mechanical Engineering
of the Russian Academy of Sciences

Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences

Effects of post-annealing duration on the properties of β-Ga2O3 thin films prepared by spray pyrolysis

Autors:
X. Zhang, D.I. Panov, V.A. Spiridonov, N.K. Kuzmenko, N.D. Prasolov, A.Yu. Ivanov, M.V. Dorogov, H.M. Wei, D.Y. Jiang, D.A. Bauman, A.E. Romanov ,
Pages:
055–063
Annotation:

The post-annealing duration dependence of structural and optical properties of polycrystalline β-Ga2O3 thin films fabricated on sapphire (Al2O3) substrate via the spray pyrolysis method are presented. Extending the annealing time for fixed temperature 900 °C from 1 to 2 h improves crystallinity of the films, as evidenced by an increase in the average grain size approximately from 8 to 14 nm, a reduction in the full width at half maximum of the β-Ga2O3 diffraction peak from 0.43 to 0.29°. However, extending the post-annealing duration to 3 h induces excessive grain coarsening into island-like crystalline domains. These findings demonstrate that for the chosen experimental conditions, a 2-hour annealing at 900 °C represents an optimum for achieving relatively smooth and solid β-Ga2O3 films while balancing crystallinity and film homogeneity.

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