Reduction of elastic strains in directly-bonded silicon structures
Year(s):
1999
Autors:
Argunova T.S. , Vitman R.F. , Grekhov I.V. , Kostina L.S. , Kudryavtseva T.V. , d.o.p.a.m.s. Gutkin M.Yu. , Shturbin A.V. , Härtwig J. , Ohler M. , Kim E.D. , Kim S.Ch. ,
Name Publication:
Physics of the Solid State
Volume Publication:
41
Issue Publication:
11
Pages:
1790 - 1798