Technological vacuum-arc sources of plasma for electronics industry
Year(s):
1998
Autors:
Lisenkov A.A. , Merva N.V. ,
Name Publication:
1998 4th International Conference on Actual Problems of Electronic Instrument Engineering, APEIE 1998 - Proceedings
Volume Publication:
1998-September
Issue Publication:
/ 768909
Pages:
57 - 58