Interfacial properties of silicon structures fabricated by vacuum grooved surface bonding technology
Year(s):
1998
Autors:
Argunova T.S. , Grekhov I.V. , Kostina L.S. , Kudryavtzeva T.V. , d.o.p.a.m.s. Gutkin M.Yu. , Härtwig J. , Kim E.-D. , Kim S.-C. , Kim N.-K. ,
Name Publication:
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume Publication:
37
Issue Publication:
12
Pages:
6287 - 6289