Dynamics and control of thin film growth process from a multicomponent gas
Year(s):
1997
Autors:
d.o.t.s. Alexander Fradkov , Guzenko P.Yu. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. ,
Name Publication:
Journal of Physics D: Applied Physics
Volume Publication:
30
Issue Publication:
20
Pages:
2794 - 2797