Raman investigation of different polytypes in SiC thin films grown by solid-gas phase epitaxy on Si
Year(s):
2010
Autors:
Wasyluk J. , Perova T.S. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Feoktistov N.A. , Grudinkin S.A. ,
Name Publication:
Materials Science Forum
Volume Publication:
645-648
Pages:
359 - 362