Photoinduced self-limited low-temperature growth of ultra-thin silicon-oxide films with water vapor
Year(s):
2006
Autors:
Patzner P. , d.o.p.a.m.s. Osipov A.V. , Hess P. ,
Name Publication:
Applied Physics A: Materials Science and Processing
Volume Publication:
85
Issue Publication:
2
Pages:
145 - 150