Optical and electrical properties of thin carbide-containing films on silicon
Year(s):
2006
Autors:
Belyaev A.P. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Rubets V.P. , Gordeev S.K. , Korchagina S.B. ,
Name Publication:
Technical Physics Letters
Volume Publication:
32
Issue Publication:
5
Pages:
414 - 416