Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates
Year(s):
2016
Autors:
d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Romanychev A.I. ,
Name Publication:
Physics of the Solid State
Volume Publication:
58
Issue Publication:
7
Pages:
1448 - 1452