Semipolar AlN on Si(100): technology and properties
Year(s):
2017
Autors:
d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Nikolai Bessonov , d.o.p.a.m.s. Osipov A.V. , A. Kalmykova, S. Konenkov, E.V. Konenkova, A. Myasoedov, V. Panteleev
Quarter:
Q1
Name Publication:
Microelectronic Engineering
Issue Publication:
178
Pages:
34–37