Pendeo-epitaxy of stress-free AlN layer on a profiled SiC/Si substrate
Year(s):
2016
Autors:
Bessolov V.N. , Karpov D.V. , Konenkova E.V. , Lipovskii A.A. , d.o.p.a.m.s. Osipov A.V. , c.o.p.a.m.s. Redkov A.V. , Soshnikov I.P. , d.o.p.a.m.s. Kukushkin S.A. ,
Name Publication:
Thin Solid Films
Volume Publication:
606
Pages:
74 - 79