Prevention of AlN crystal from cracking on SiC substrates by evaporation of the substrates
Year(s):
2015
Autors:
Argunova T.S. , d.o.p.a.m.s. Gutkin M.Yu. , Mokhov E.N. , Kazarova O.P. , Lim J.-H. , Shcheglov M.P. ,
Name Publication:
Physics of the Solid State
Volume Publication:
57
Issue Publication:
12
Pages:
2473 - 2478