Synthesis of epitaxial silicon carbide films through the substitution of atoms in the silicon crysta
Year(s):
2014
Autors:
d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Feoktistov N.A. ,
Name Publication:
Physics of the Solid State
Volume Publication:
56
Issue Publication:
8
Pages:
1507 - 1535