Technological capabilities of vacuum arc plasma sources: Plasmochemical synthesis of nitride compoun
Year(s):
2014
Autors:
Bystrov Yu.A. , Vetrov N.Z. , Lisenkov A.A. , Kostrin D.K. ,
Name Publication:
Vakuum in Forschung und Praxis
Volume Publication:
26
Issue Publication:
5
Pages:
19 - 23