Usage of nanoceramic based on ZrO2in fabrication of sources for magnetron sputtering
Year(s):
2014
Autors:
d.o.c.s. Konanov V.G. , Ovid'ko I.A. , Kurapova O.Y. , Novik N.N. , c.o.c.s. Ivan Archakov ,
Name Publication:
Materials Physics and Mechanics
Volume Publication:
21
Issue Publication:
3
Pages:
305 - 310