Epitaxial silicon carbide on a 6″ silicon wafer
Year(s):
2014
Autors:
d.o.p.a.m.s. Kukushkin S.A. , Lukyanov A.V. , d.o.p.a.m.s. Osipov A.V. , Feoktistov N.A. ,
Name Publication:
Technical Physics Letters
Volume Publication:
40
Issue Publication:
1
Pages:
36 - 39