Influence of Orientation of a Silicon Substrate with a Buffer Silicon Carbide Layer on Dielectric an
Year(s):
2019
Autors:
Sergeeva O.N. , Solnyshkin A.V. , Kiselev D.A. , Il’ina T.S. , d.o.p.a.m.s. Kukushkin S.A. , c.o.p.a.m.s. Sharofidinov Sh.Sh. , Kaptelov E.Y. , Pronin I.P. ,
Name Publication:
Physics of the Solid State
Volume Publication:
61
Issue Publication:
12
Pages:
2386 - 2391