Epitaxial Growth of Zinc Sulfide by Atomic Layer Deposition on SiC/Si Hybrid Substrates
Year(s):
2019
Autors:
Antipov V.V. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. ,
Name Publication:
Technical Physics Letters
Volume Publication:
45
Issue Publication:
11
Pages:
1075 - 1077