Microstructure and electrical response of thin SiC films on Si substrates of p- and n-types
Year(s):
2019
Autors:
Sergeeva O.N. , Solnyshkin A.V. , Nekrasova G.M. , Senkevich S.V. , Pronin I.P. , d.o.p.a.m.s. Kukushkin S.A. ,
Name Publication:
Ferroelectrics
Volume Publication:
542
Issue Publication:
1
Pages:
52 - 57