Studying Evolution of the Ensemble of Micropores in a SiC/Si Structure during Its Growth by the Meth
Year(s):
2019
Autors:
c.o.p.a.m.s. Redkov A.V. , c.o.p.a.m.s. Grashchenko A.S. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Kotlyar K.P. , Likhachev A.I. , Nashchekin A.V. , Soshnikov I.P. ,
Name Publication:
Physics of the Solid State
Volume Publication:
61
Issue Publication:
3
Pages:
299 - 306