Formation of ordered ZnO structures grown by the ALD method on hybrid SiC/Si (100) substrates
Year(s):
2019
Autors:
d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , Kasatkin I.A. , Mikhailovskii V.Y. , Romanychev A.I. ,
Name Publication:
Materials Physics and Mechanics
Volume Publication:
42
Issue Publication:
1
Pages:
30 - 39