Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Ep
Year(s):
2018
Autors:
Kalinkin I.P. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. ,
Name Publication:
Semiconductors
Volume Publication:
52
Issue Publication:
6
Pages:
802 - 808