Cleaning of the dielectric surfaces using a controlled gas-discharge source of fast neutral particle
Year(s):
2017
Autors:
Fadeev A.S. , Talanov A.S. , Kostrin D.K. , Trifonov S.A. , Lisenkov A.A. , Goncharov V.D. ,
Name Publication:
Journal of Physics: Conference Series
Volume Publication:
872
Issue Publication:
1 / 012021