Semipolar AlN on Si(100): Technology and properties
Year(s):
2017
Autors:
Bessolov V. , Kalmykov A. , Konenkov S. , Konenkova E. , d.o.p.a.m.s. Kukushkin S.A. , Myasoedov A. , d.o.p.a.m.s. Osipov A.V. , Panteleev V. ,
Name Publication:
Microelectronic Engineering
Volume Publication:
178
Pages:
34 - 37