Semipolar AlN and GaN on Si(100): HVPE technology and layer properties
Year(s):
2017
Autors:
Bessolov V. , Kalmykov A. , Konenkova E. , d.o.p.a.m.s. Kukushkin S.A. , Myasoedov A. , Poletaev N. , Rodin S. ,
Name Publication:
Journal of Crystal Growth
Volume Publication:
457
Pages:
202 - 206