Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam
Year(s):
2022
Autors:
d.o.p.a.m.s. A.V. Morozov , d.o.p.a.m.s. Dmitry A. Indeitsev , Igumnova V.S. , Lukin A.V. , Popov I.A. , c.o.p.a.m.s. Lev Shtukin ,
Name Publication:
International Journal of Non-Linear Mechanics
Volume Publication:
138
Issue Publication:
/ 103852