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НАУЧНЫЕ ПУБЛИКАЦИИ/ Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam — Институт Проблем Машиноведения РАН ( ИПМаш РАН )
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Институт Проблем Машиноведения РАН ( ИПМаш РАН ) Институт Проблем Машиноведения РАН ( ИПМаш РАН )

Institute for Problems in Mechanical Engineering
of the Russian Academy of Sciences

Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences

Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam

Year(s):
2022
Autors:
Name Publication:
International Journal of Non-Linear Mechanics
Volume Publication:
138
Issue Publication:
/ 103852
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