Elastic properties of porous silicon layer of hybrid SiC/Si substrates
Year(s):
2021
Autors:
Eremeev I.A. , Koryakin A.A. , d.o.p.a.m.s. Kukushkin S.A. ,
Name Publication:
Journal of Physics: Conference Series
Volume Publication:
2086
Issue Publication:
1 / 012006