Mechanical Properties of Epilayers of Metastable α- and ε-Ga2O3 Phases Studied by Nanoindentation
Year(s):
2021
Autors:
Guzilova L.I. , c.o.p.a.m.s. Grashchenko A.S. , Butenko P.N. , Chikiryaka A.V. , Pechnikov A.I. , Nikolaev V.I. ,
Name Publication:
Technical Physics Letters
Volume Publication:
47
Issue Publication:
10
Pages:
709 - 713