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Институт Проблем Машиноведения РАН ( ИПМаш РАН ) Институт Проблем Машиноведения РАН ( ИПМаш РАН )

Institute for Problems in Mechanical Engineering
of the Russian Academy of Sciences

Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences
  2. Research Activity
  3. Nanoindentation of AlN, GaN, and AlGaN films grown by HVPE on SiC/Si hybrid substrates

Nanoindentation of AlN, GaN, and AlGaN films grown by HVPE on SiC/Si hybrid substrates

Year(s):
2021
Autors:
c.o.p.a.m.s. Grashchenko A.S. , d.o.p.a.m.s. Kukushkin S.A. , d.o.p.a.m.s. Osipov A.V. , c.o.p.a.m.s. Sharofidinov Sh.Sh. ,
Name Publication:
Journal of Physics: Conference Series
Volume Publication:
1954
Issue Publication:
1 / 012009
DOI:
https://doi.org/10.1088/1742-6596/1954/1/012009
Web address:
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85109353051&doi=10.1088%2f1742-6596%2f1954%2f1%2f012009&partnerID=40&md5=b5b0d0806f3682e11e83fb13e18e6ae2
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