The Influence of the Porosity of Silicon Layer on the Elastic Properties of Hybrid SiC/Si Substrates
Year(s):
2021
Autors:
Koryakin A.A. , Eremeev Y.A. , d.o.p.a.m.s. Osipov A.V. , d.o.p.a.m.s. Kukushkin S.A. ,
Name Publication:
Technical Physics Letters
Volume Publication:
47
Issue Publication:
2
Pages:
126 - 129