Sublimation anisotropic etching of silicon carbide in aluminum nitride vapors
Year(s):
2021
Autors:
Argunova T.S. , Kazarova O.P. , d.o.p.a.m.s. Gutkin M.Yu. , Mokhov E.N. ,
Name Publication:
ECS Journal of Solid State Science and Technology
Volume Publication:
10
Issue Publication:
4 / 045008