A Novel Model of a Mode-Localized MEMS Accelerometer
Year(s):
2020
Autors:
d.o.p.a.m.s. A.V. Morozov , d.o.p.a.m.s. Dmitry A. Indeitsev , Igumnova V.S. , Belyaev Y.V. , Lukin A.V. , Popov I.A. , c.o.p.a.m.s. Lev Shtukin ,
Name Publication:
Doklady Physics
Volume Publication:
65
Issue Publication:
10
Pages:
371 - 375