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НАУЧНЫЕ ПУБЛИКАЦИИ/ A Novel Model of a Mode-Localized MEMS Accelerometer — Институт Проблем Машиноведения РАН ( ИПМаш РАН )
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Институт Проблем Машиноведения РАН ( ИПМаш РАН ) Институт Проблем Машиноведения РАН ( ИПМаш РАН )

Institute for Problems in Mechanical Engineering
of the Russian Academy of Sciences

Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences

A Novel Model of a Mode-Localized MEMS Accelerometer

Year(s):
2020
Autors:
d.o.p.a.m.s. A.V. Morozov , d.o.p.a.m.s. Dmitry A. Indeitsev , Igumnova V.S. , Belyaev Y.V. , Lukin A.V. , Popov I.A. , c.o.p.a.m.s. Lev Shtukin ,
Name Publication:
Doklady Physics
Volume Publication:
65
Issue Publication:
10
Pages:
371 - 375
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