Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic e
Year(s):
2005
Autors:
Patzner P. , d.o.p.a.m.s. Osipov A.V. , Hess P. ,
Name Publication:
Applied Surface Science
Volume Publication:
247
Issue Publication:
1-4
Pages:
204 - 210