Influence of thermal cathode mode on properties of coatings deposited from metal plasma of vacuum-ar
Year(s):
2002
Autors:
Kuznezov V.G. , Lisenkov A.A. , Pavlova V.A. , Vetrov N.Z. ,
Name Publication:
Plasma Devices and Operations
Volume Publication:
10
Issue Publication:
3
Pages:
179 - 186