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Zn diffusion from vapor phase into InGaAs/InP heterostructure using diethylzinc as a p-dopant source
Autors:
S.A. Blokhin, R.V. Levin, V.S. Epoletov, A.G. Kuzmenkov, A.A. Blokhin,
M.A Bobrov, Y.N. Kovach, N.A. Maleev, V.V. Andryushkin, A.P. Vasil’ev,
K.O. Voropaev, V.M. Ustinov
Pages:
038-045